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1

Effect of the target power density on the synthesis and physical properties of sputtered nc-C films

Hyun S. Myung, Yong S. Park, B. Hong, Jeon G. Han, Young H. Kim, Jeong Y. Lee, Leonid R. Shaginyan

Journal:

Thin Solid Films

Year:

2006

Language:

english

File:

PDF, 1.11 MB

english, 2006

2

Particularities of condensation of atoms with increased kinetic energy

Leonid R. Shaginyan, Jeon Geon Han, Nikolay V. Britun

Journal:

Year:

2006

Language:

english

File:

PDF, 179 KB

english, 2006

3

Deposition of Ti thin film using the magnetron sputtering method

Min J. Jung, Kyung H. Nam, Leonid R. Shaginyan, Jeon G. Han

Journal:

Thin Solid Films

Year:

2003

Language:

english

File:

PDF, 884 KB

english, 2003

4

Energy resolved ion mass spectroscopy of the plasma during reactive magnetron sputtering

Martin Mišina, Leonid R. Shaginyan, Marijan Maček, Peter Panjan

Journal:

Surface and Coatings Technology

Year:

2001

Language:

english

File:

PDF, 441 KB

english, 2001

5

Microstructure and mechanical properties of Cu doped TiN superhard nanocomposite coatings

Hyun S Myung, Hyuk M Lee, Leonid R Shaginyan, Jeon G Han

Journal:

Surface and Coatings Technology

Year:

2003

Language:

english

File:

PDF, 747 KB

english, 2003

6

Microstructure and mechanical properties of Ti–Ag–N and Ti–Cr–N superhard nanostructured coatings

Jeon G. Han, Hyun S. Myung, Hyuk M. Lee, Leonid R. Shaginyan

Journal:

Surface and Coatings Technology

Year:

2003

Language:

english

File:

PDF, 206 KB

english, 2003

7

Mechanisms for Hardening Film Materials: W - Ti - and TiN - Cu Systems as Examples

Leonid R. Shaginyan, Alexander V. Kurdyumov

Journal:

Powder Metallurgy and Metal Ceramics

Year:

2005

Language:

english

File:

PDF, 410 KB

english, 2005

8

Synthesis and mechanical properties of hydrogenated carbon and carbon nitride films prepared by magnetron sputtering

Hyun S. Myung, Yong S. Park, B. Hong, Jeon G. Han, Leonid R. Shaginyan

Journal:

Thin Solid Films

Year:

2006

Language:

english

File:

PDF, 249 KB

english, 2006

9

Polycrystalline Si thin film growth on glass using pulsed d.c. magnetron sputtering

Min J. Jung, Yun M. Jung, Leonid R. Shaginyan, Jeon G. Han

Journal:

Thin Solid Films

Year:

2002

Language:

english

File:

PDF, 705 KB

english, 2002

10

Structural Nonuniformity and Internal Stress in Chromium Films Deposited by Magnetron Sputtering

Shaginyan, Leonid, Han, Jeon Geon, Lee, Hyuk Min

Journal:

Japanese Journal of Applied Physics

Year:

2004

Language:

english

File:

PDF, 409 KB

english, 2004

11

Effect of the Surface Temperature on Formation of Low-Temperature Phase in Magnetron-Sputtered Chromium Films

Shaginyan, Leonid R., Han, Jeon Geon, Britun, Nikolay V.

Journal:

Japanese Journal of Applied Physics

Year:

2005

Language:

english

File:

PDF, 112 KB

english, 2005

12

Handbook of Thin Films || Pulsed laser deposition of thin films

R. Shaginyan, Leonid

Year:

2002

Language:

english

File:

PDF, 11.03 MB

english, 2002

13

On the target surface temperature during dc magnetron sputtering

Shaginyan, Leonid R., Shaginyan, Vasily R., Kuzmichev, Anatoly I., Mironov, Mikhail I.

Journal:

The European Physical Journal Applied Physics

Year:

2020

File:

PDF, 496 KB

2020

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